Specifi-cation no | Technical specification | Comment |
---|---|---|
1 | Manufacturer and instrument model | For documenting the quality of the instrument |
2 | Acceleration voltage | |
3 | Working distance | |
4 | Beam current | |
5 | Resolution (spot size) | |
6 | Detector type used | SE, BSE |
7 | Make, and serial number of sample coater used | For documenting the quality of the sample preparation |
8 | Sample coating material | No coating, C, Au |