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Table 1 EDS analysis of ALD coating removal

From: Protecting silver cultural heritage objects with atomic layer deposited corrosion barriers

  100 nm Al2O3 ALD 140 nm Al2O3 ALD 0.05 wt% NaOH for 2 h 0.5 wt% NaOH for 25 min
Clear area (At %) Hazy area (At %) Clear area (At %) Clear area (At %) Hazy area (At %) Clear area (At %) Hazy area (At %)
Ag 34.27 ± 2.4 40.47 ± 2.5 4.64 ± 1.1 53.85 ± 2.6 47.16 ± 2.6 88.12 ± 2.7 88.36 ± 2.8
Cu 3.50 ± 0.3 6.12 ± 0.4 8.34 ± 0.5 7.23 ± 0.5 11.88 ± 0.5 11.64 ± 0.5
Al 5.70 ± 0.2 4.77 ± 0.2 17.47 ± 0.8 2.54 ± 0.1 3.67 ± 0.2
O 56.53 ± 3.4 48.65 ± 3.2 77.89 ± 5.0 35.27 ± 2.3 41.96 ± 2.8
  1. EDS analysis of Ag, Cu, Al and O in the clear and hazy ALD coating areas are shown for both concentrations of NaOH
  2. ALD coating removal was incomplete after removal with 0.05 wt% NaOH, as indicated by the presence of Al and O
  3. Complete coating removal was achieved with 0.5 wt% NaOH