Technique | Identifies | Lateral resolution | Sample preparation | Possible damages |
---|---|---|---|---|
SEM–EDX | Elements (Z > 10) | ~ 100 nm | Metallization | Surface cleaning |
ATR-FTIR | Organic and Inorganic compounds | 1–10 μm | None | Indentation |
Raman | Organic and Inorganic compounds | 1–10 μm | None | Nonea |
Micro-TRPL | Luminescent compounds | 1–10 μm | None | Nonea |