Fig. 7

Measurement results of reference target with four grooves. Mean error relative to the Hirox Nano Point Scanner (NPS) measurements (in \(\upmu \hbox {m}\)), measured locally between top and bottom surface for every groove (see Fig. 6), from the deepest (left) to shallowest (right) groove. Dotted lines show the theoretical scanning resolution (in X) of the imaging devices (corresponding colours)